Kozlov Alexey S.
  • Affiliation
    Concern CSRI Elektropribor, JSC
  • St. Petersburg, Russian Federation

Micromechanical sensors design method based on system-level modeling

MEMS Technologies: Theory and Practice
  • Year: 2021
  • Volume: 14
  • Issue: 2
  • 18
  • 1172
  • Pages: 79-92