Publication schedule
  • №4 December 2021
  • №1 March 2022
  • №2 June 2022
Salamatova Ulyana V.
  • Affiliation
    Peter the Great St. Petersburg Polytechnic University
  • St. Petersburg, Russian Federation

Capacitive MEMS microphones for medical applications

MEMS Technologies: Theory and Practice
  • Year: 2021
  • Volume: 14
  • Issue: 2
  • 17
  • 248
  • Pages: 65-78