Publication schedule
  • №2 June 2024
  • №3 September 2024
  • №4 December 2024
Salamatova Ulyana V.
  • Affiliation
    Peter the Great St. Petersburg Polytechnic University
  • St. Petersburg, Russian Federation

Capacitive MEMS microphones for medical applications

MEMS Technologies: Theory and Practice
  • Year: 2021
  • Volume: 14
  • Issue: 2
  • 48
  • 3449
  • Pages: 65-78