Publication schedule
  • №3 September 2025
  • №4 December 2025
Ulyana  V. Salamatova
Ulyana V. Salamatova
Affiliation
Peter the Great St. Petersburg Polytechnic University
St. Petersburg, Russian Federation

Capacitive MEMS microphones for medical applications

MEMS Technologies: Theory and Practice
  • Year: 2021
  • Volume: 14
  • Issue: 2
  • 54
  • 5542
  • Pages: 65-78