Technologies & Devices NMST Lab

SEMICON Russia 2014
Authors:
Akulshin Yurii D. Glukhovskoy Anatoliy V. Kazakin Aleksey N. Kozlov Vladislav P. Korshunov Andrey V. Komarevtcev Ivan M. Lurie Mikhail S. Piatyshev Evgenii N.
Abstract:

The given paper presents the research work results of the Nano- and Microsystems Technology laboratory in the field of the technology development and MEMS transducers for different purposes.