Multifunctional Thermal Sensors

SEMICON Russia 2014
Authors:
Akulshin Yurii D. Glukhovskoy Anatoliy V. Kazakin Aleksey N. Komarevtcev Ivan M. Lurie Mikhail S. Piatyshev Evgenii N.
Abstract:

The give paper presents the results of NMST Lab in designing and researching thermal MEMS sensors for different purposes. The sensors are based on the MEMS-core converter and micromachining technologies.