Magnetic MEMS

SEMICON Russia 2014

Magnetic MEMS (Micro Electro Mechanical Systems) gained much of importance during the past 25 years. Today for example magnetic MEMS are part of the sensor network in cars. Magnetic sensors measure the rotation of the wheels to generate the information necessary for the ABS (anti-lock brake system) or for stabilization systems like ESC (Electronic Stability Control). They are also used to measure the angle of the stirring wheel as a basic part to implement the drive by wire concept. Another important field of application is the consumer electronic. MEMS are used as a part of an electronic compass. There are many more examples for magnetic sensors and actuators. We will present some examples for magnetic sensors and actuators developed during the last four years at the Institute for Micro Production Technology (IMPT) in Hanover.