Chemical vapor deposition of polytetrafluoroethylene dielectric films
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Abstract:
Design of experimental hot-wire chemical vapor deposition reactor, developed for investigation of polytetrafluoroethylene films deposition based on hot tungsten wire assisted decomposition of Hexafluoropropylene Oxide, is considered. Experimental data, proving the feasibility of polytetrafluoroethylene deposition, and basic deposition process dependencies are presented.