Computing, Telecommunications and Control
    Computing, Telecommunications and ControlPeter the Great St. Petersburg Polytechnic University
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    Articles by keywords "METALLORGANIC PRECURSOR"

    Chemical vapor deposition of Ni films from bis-(ethylcyclopentadienyl) nickel

    Electronics, Electronic Equipment Material ProductionTechnologies
    Protopopova V.S.Alexandrov S.E.
    • Year: 2011
    • Issue: 3
    • 0
    • 8563
    • Pages: 145-150