Computing, Telecommunications and Control
Computing, Telecommunications and Control Peter the Great St. Petersburg Polytechnic University
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  • №2 June 2025
  • №3 September 2025
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Articles by keywords "hafnium oxide"

Atomic Layer Deposition Technology for Electronic Components Production

Hardware of computer, Telecommunications and Control Systems
Aliabev A.A.
  • Year: 2015
  • Issue: 4
  • 703
  • 7874
  • Pages: 51-58