Computing, Telecommunications and Control
    Computing, Telecommunications and ControlPeter the Great St. Petersburg Polytechnic University
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    • №4 December 2026
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    Articles by keywords "gas flow through"

    LBA Differential Pressure Sensors High Immunity to Dust Contamination

    SEMICON Russia 2014
    Thieme T.
    • Year: 2014
    • Issue: 5
    • 331
    • 9207
    • Pages: 8-20