Computing, Telecommunications and Control
    Computing, Telecommunications and ControlPeter the Great St. Petersburg Polytechnic University
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    ISSN 2687-0517
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    Articles by keywords "High-k dielectrics"

    Atomic Layer Deposition Technology for Electronic Components Production

    Hardware of computer, Telecommunications and Control Systems
    Aliabev A.A.
    • Year: 2015
    • Issue: 4
    • 706
    • 10026
    • Pages: 51-58