Computing, Telecommunications and Control
Computing, Telecommunications and Control Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "High-k dielectrics"

Atomic Layer Deposition Technology for Electronic Components Production

Hardware of computer, Telecommunications and Control Systems
Aliabev A.A.
  • Year: 2015
  • Issue: 4
  • 704
  • 9584
  • Pages: 51-58