Computing, Telecommunications and Control
Computing, Telecommunications and Control Peter the Great St. Petersburg Polytechnic University
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Articles by keywords "GAS-PHASE SYNTHESIS NANOMATERIALS"

Modelling of chemical vapor deposition for growth of thin films

Mathematical Modelling: Methods, algorithms, technologies
Boldyrev Yu.Ya. Zamotin K.Yu. Petukhov E.P.
  • Year: 2011
  • Issue: 6
  • 1
  • 7738
  • Pages: 102-108