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<article article-type="research-article" dtd-version="1.3" xml:lang="en">
  <front xmlns:xlink="http://www.w3.org/1999/xlink">
    <journal-meta>
      <journal-title-group>
        <journal-title>Computing, Telecommunication and Control</journal-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Информатика, телекоммуникации и управление</trans-title>
        </trans-title-group>
      </journal-title-group>
      <issn pub-type="epub">2687-0517</issn>
    </journal-meta>
    <article-meta xmlns:xlink="http://www.w3.org/1999/xlink">
      <article-id pub-id-type="publisher-id">5</article-id>
      <article-id pub-id-type="doi">10.18721/JCSTCS.14205</article-id>
      <title-group>
        <article-title>Capacitive MEMS microphones for medical applications</article-title>
        <trans-title-group xml:lang="ru">
          <trans-title>Ёмкостные МЭМС-микрофоны для медицинского применения</trans-title>
        </trans-title-group>
      </title-group>
      <contrib-group>
        <contrib contrib-type="author">
          <contrib-id contrib-id-type="orcid">0000-0003-3103-7060</contrib-id>
          <name>
            <surname>Loboda</surname>
            <given-names>Vera</given-names>
          </name>
          <xref ref-type="aff" rid="aff1"/>
        </contrib>
        <contrib contrib-type="author">
          <name>
            <surname>Salamatova</surname>
            <given-names>Ulyana</given-names>
          </name>
          <xref ref-type="aff" rid="aff2"/>
          <email>salamatova.uv@edu.spbstu.ru</email>
        </contrib>
      </contrib-group>
      <aff id="aff1">Peter the Great St.Petersburg Polytechnic University</aff>
      <aff id="aff2">Peter the Great St. Petersburg Polytechnic University</aff>
      <pub-date publication-format="electronic" date-type="pub" iso-8601-date="2021-06-30">
        <day>30</day>
        <month>06</month>
        <year>2021</year>
      </pub-date>
      <volume>14</volume>
      <issue>2</issue>
      <fpage>65</fpage>
      <lpage>78</lpage>
      <self-uri xmlns:xlink="http://www.w3.org/1999/xlink" content-type="pdf" xlink:href="https://infocom.spbstu.ru/userfiles/files/articles/2021/2/65-78.pdf"/>
      <abstract xml:lang="en">
        <p>Microphones manufactured based on MEMS technology have been significantly applied in medicine. However, medical application requires more sensitive and low-frequency MEMS microphones. To achieve this goal capacitive microphones are the most appropriate as they have a low level of noise and high sensitivity compared to piezoelectric and piezoresistive microphones. The structure and materials enable to change electric parameters of microphones for better. To increase sensitivity it is possible to find a membrane structure when internal mechanical resistivity is minimal. When MEMS structures are ideally found, a frequencies range can be expanded. Membrane flexibility can be expanded by means of applying meshes at the edges, corrugations and springs.</p>
      </abstract>
      <kwd-group xml:lang="en">
        <kwd>MEMS</kwd>
        <kwd>capacitive microphone</kwd>
        <kwd>low frequency microphone</kwd>
        <kwd>sensitivity</kwd>
        <kwd>membrans</kwd>
      </kwd-group>
    </article-meta>
  </front>
</article>
