Computing, Telecommunication and Control Информатика, телекоммуникации и управление 2687-0517 4 Multifunctional Thermal Sensors Многофункциональные тепловые МЭМC-датчики Akulshin Yurii akulshin_yud@spbstu.ru Glukhovskoy Anatoliy togl@mail.ru Kazakin Aleksey keha@newmail.ru Komarevtcev Ivan vanec@aport.ru Lurie Mikhail milur@mail.ru Piatyshev Evgenii pen@mems.ru Peter the Great St. Petersburg Polytechnic University 10 10 2014 5 205 43 52

The give paper presents the results of NMST Lab in designing and researching thermal MEMS sensors for different purposes. The sensors are based on the MEMS-core converter and micromachining technologies.

 technology sensors MEMS